Hydrogen-Induced Crystallization of Germanium Films at Low Temperature Using an RF-PECVD Reactor
- 期刊名称ECS Transactions
- 作者Dushaq, Ghada; Rasras, Mahmoud; Nayfeh, Ammar
- 卷第77卷
- 期第5期
- 印刷ISSN1938-6737
- 电子ISSN1938-5862
- 文件大小285.36KB
- 发表时间2017-04-26
- DOI10.1149/07705.0213ecst
- 页码213-217
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