Study of surface morphology, structure, mechanical and tribological properties of an AlSiN coating obtained by the cathodic arc deposition method

Petkov, Nikolay; Bakalova, Totka; Cholakova, Tetiana; Bahchedzhiev, Hristo; Louda, Petr; Ryšánek, Petr; Kormunda, Martin; Čapková, Pavla; Kejzlar, Pavel

期刊名称Superlattices and Microstructures
作者Petkov, Nikolay; Bakalova, Totka; Cholakova, Tetiana; Bahchedzhiev, Hristo; Louda, Petr; Ryšánek, Petr; Kormunda, Martin; Čapková, Pavla; Kejzlar, Pavel
印刷ISSN0749-6036
文件大小4376.00KB
发表时间2017-5
DOI10.1016/j.spmi.2017.05.022

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Study of surface morphology, structure, mechanical and tribological properties of an AlSiN coating obtained by the cathodic arc deposition method