Characterization of critical conditions for fracture during wafer testing by FEM and experiments
Ochoa Brezmes, Angel; Reuther, Georg; Gneupel, Andreas; Breitkopf, Cornelia
- 期刊名称Materials Science in Semiconductor Processing
- 作者Ochoa Brezmes, Angel; Reuther, Georg; Gneupel, Andreas; Breitkopf, Cornelia
- 卷第67卷
- 印刷ISSN1369-8001
- 文件大小3042.67KB
- 发表时间2017-08
- DOI10.1016/j.mssp.2017.05.020
- 页码124-140