MOEMS transducer with a non-linear transfer characteristic for static displacement measurement applications on the example of an inclination sensor

Steiner, H.; Hortschitz, W.; Kainz, A.; Stifter, M.; Jachimowicz, A.; Schalko, J.; Keplinger, F.; Kohl, F.

期刊名称Sensors and Actuators A: Physical
作者Steiner, H.; Hortschitz, W.; Kainz, A.; Stifter, M.; Jachimowicz, A.; Schalko, J.; Keplinger, F.; Kohl, F.
印刷ISSN0924-4247
文件大小2086.01KB
发表时间2017-5
DOI10.1016/j.sna.2017.05.035

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