SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 25 June 2017)] Optical Measurement Systems for Industrial Inspection X - Vibration compensated high-resolution scanning white-light Linnik-interferometer
Lehmann, Peter; Osten, Wolfgang; Albertazzi Gonçalves, Armando; Tereschenko, Stanislav; Lehmann, Peter; Gollor, Pascal; Kuehnhold, Peter
- 作者Lehmann, Peter; Osten, Wolfgang; Albertazzi Gonçalves, Armando; Tereschenko, Stanislav; Lehmann, Peter; Gollor, Pascal; Kuehnhold, Peter
- 卷第10329卷
- 印刷ISSN0277-786X
- 文件大小631.41KB
- 发表时间2017
- DOI10.1117/12.2270226