Improving the Yield and Lifetime of Microfabricated Sensors for Harsh Environments

Blair, E.O.; Corrigan, D.K.; Levene, H.J.; Schmueser, I.; Terry, J.G.; Smith, S.; Mount, A.R.; Walton, A.J.

期刊名称IEEE Transactions on Semiconductor Manufacturing
作者Blair, E.O.; Corrigan, D.K.; Levene, H.J.; Schmueser, I.; Terry, J.G.; Smith, S.; Mount, A.R.; Walton, A.J.
印刷ISSN0894-6507
电子ISSN1558-2345
文件大小1488.62KB
发表时间2017
DOI10.1109/TSM.2017.2715377
页码1-1

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