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Design, fabrication and characterization of flexible MEMS accelerometer using multi-Level UV-LIGA

Design, fabrication and characterization of flexible MEMS accelerometer using multi-Level UV-LIGA

Mahmood, Md. Sohel; Celik-Butler, Zeynep; Butler, Donald P.
  • 期刊名称Sensors and Actuators A: Physical
  • 作者Mahmood, Md. Sohel; Celik-Butler, Zeynep; Butler, Donald P.
  • 卷第263卷
  • 印刷ISSN0924-4247
  • 文件大小4196.99KB
  • 发表时间2017-08
  • DOI10.1016/j.sna.2017.07.007
  • 页码530-541
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