Thermal oxidation kinetics of germanium
- 期刊名称Applied Physics Letters
- 作者Wang, X.; Nishimura, T.; Yajima, T.; Toriumi, A.
- 卷第111卷
- 期第5期
- 印刷ISSN0003-6951
- 电子ISSN1077-3118
- 文件大小1250.35KB
- 发表时间2017-07-31
- DOI10.1063/1.4997298
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