Silicon Anisotropic Etching in Ternary Solution Composed of TΜΑΗ+Triton+NH 2 ΟΗ
- 期刊名称ECS Transactions
- 作者Swarnalatha, Veerla; Narasimha Rao, Avvaru Venkata; Pal, Prem
- 卷第77卷
- 期第11期
- 印刷ISSN1938-6737
- 电子ISSN1938-5862
- 文件大小636.09KB
- 发表时间2017-07-07
- DOI10.1149/07711.1737ecst
- 页码1737-1745
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