A Novel Technique for Design of Ultra High Tunable Electrostatic Parallel Plate RF MEMS Variable Capacitor
- 期刊名称Sensing and Imaging
- 作者Baghelani, Masoud; Ghavifekr, Habib Badri
- 卷第18卷
- 期第1期
- 印刷ISSN1557-2064
- 电子ISSN1557-2072
- 文件大小783.85KB
- 发表时间2017-12
- DOI10.1007/s11220-017-0180-9