Microwave Annealing as a Low Thermal Budget Technique for ZnO Thin-Film Transistors Fabricated Using Atomic Layer Deposition

• 期刊名称IEEE Electron Device Letters
• 作者Yue, Lei; Fu, Chao-Chao; Sun, Feng; Qiu, Zhi-Jun; Zhang, Shi-Li; Wu, Dongping
• 卷第38卷
• 期第10期
• 印刷ISSN0741-3106
• 电子ISSN1558-0563
• 文件大小1167.54KB
• 发表时间2017-10
• DOI10.1109/LED.2017.2740221
• 页码1390-1393