![High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint lithography technology]()
High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint lithography technologyLenk, Claudia; Krivoshapkina, Yana; Hofmann, Martin; Lenk, Steve; Ivanov, Tzvetan; Rangelow, Ivo W.; Ahmad, Ahmad; Reum, Alexander; Holz, Mathias; Glinsner, Thomas; Eibelhuber, Martin; Treiblmayr, Dominik; Schamberger, Barbara; Chouiki, Mustapha; Chan, Boon Teik; el Otell, Ziad; de Marneffe, Jean-François · Journal of Vacuum Science & Technology B · 2019