[IEEE 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Bordeaux, France (2017.5.29-2017.6.1)] 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Integration of electrodes with diphasic microfluidics for capacitance tuning
- 作者Azzopardi, Charles-Louis; Chollet, Franck; Tarchichi, Nathalie; Manceau, Jean-Francois
- 文件大小314.83KB
- 发表时间2017
- DOI10.1109/DTIP.2017.7984466
- 页码1-4
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