Ion source surface processing based on glow discharge in supersonic cross gas flow control
- 期刊名称IOP Conference Series: Materials Science and Engineering
- 作者Israphilov, D I
- 卷第240卷
- 印刷ISSN1757-8981
- 电子ISSN1757-899X
- 文件大小333.85KB
- 发表时间2017-09
- DOI10.1088/1757-899X/240/1/012029
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