Topography Measurement of Large-Range Microstructures through Advanced Fourier-Transform Method and Phase Stitching in Scanning Broadband Light Interferometry
- 期刊名称Micromachines
- 作者Zhou, Yi; Tang, Yan; Yang, Yong; Hu, Song
- 卷第8卷
- 期第11期
- 电子ISSN2072-666X
- 文件大小4569.24KB
- 发表时间2017-10-26
- DOI10.3390/mi8110319
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