Dual displacement resolution encoder by integrating single holographic grating sensor and heterodyne interferometry
- 期刊名称Optics Express
- 作者Hsu, Cheng-Chih; Chen, Hang; Chiang, Chia-Wei; Chang, Yu-Wei
- 卷第25卷
- 期第24期
- 电子ISSN1094-4087
- 文件大小6564.84KB
- 发表时间2017-11-27
- DOI10.1364/oe.25.030189
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