Metal-germanium-metal photodetector grown on silicon using low temperature RF-PECVD
Dushaq, Ghada; Nayfeh, Ammar; Rasras, Mahmoud
- 期刊名称Optics Express
- 作者Dushaq, Ghada; Nayfeh, Ammar; Rasras, Mahmoud
- 卷第25卷
- 期第25期
- 电子ISSN1094-4087
- 文件大小2739.04KB
- 发表时间2017-12-11
- DOI10.1364/oe.25.032110