Scanning electron microscope line-profile analysis of less-than-10-nm patterns

• 期刊名称Japanese Journal of Applied Physics
• 作者Hatano, Michio; Nakayama, Yoshinori; Hotta, Shoji; Momonoi, Yoshinori; Wang, Zhigang
• 卷第56卷
• 印刷ISSN0021-4922
• 电子ISSN1347-4065
• 文件大小1651.09KB
• 发表时间2017-06-01
• DOI10.7567/JJAP.56.06GC02