Multiphysics model investigating performance of a micromachined floating element shear stress sensor
- 期刊名称Sensors and Actuators A: Physical
- 作者Kastor, Nikolas; Zhao, Zhengxin; White, Robert D.
- 卷第269卷
- 印刷ISSN0924-4247
- 文件大小4279.65KB
- 发表时间2018-01
- DOI10.1016/j.sna.2017.11.004
- 页码1-13
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