Passivation of Ge/high- κ interface using RF Plasma nitridation
- 期刊名称Semiconductor Science and Technology
- 作者Dushaq, Ghada; Nayfeh, Ammar; Rasras, Mahmoud
- 卷第33卷
- 期第1期
- 印刷ISSN0268-1242
- 电子ISSN1361-6641
- 文件大小2826.90KB
- 发表时间2018-01-01
- DOI10.1088/1361-6641/aa98cd
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