Phosphorus doping of diamond-like carbon films by radio frequency CVD-cum-evaporation technique

• 期刊名称Diamond and Related Materials
• 作者Dey, Rajkumar; Dolai, Sukdev; Hussain, Shamima; Bhar, Radhaballav; Pal, Arun Kumar
• 印刷ISSN0925-9635
• 文件大小2280.23KB
• 发表时间2018-1
• DOI10.1016/j.diamond.2018.01.002