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$Thermal-oxidation-induced local lattice distortion at surface of 4H-SiC(0001) characterized by in-plane X-ray diffractometry$

Thermal-oxidation-induced local lattice distortion at surface of 4H-SiC(0001) characterized by in-plane X-ray diffractometry

Hatmanto, Adhi Dwi; Kita, Koji

期刊名称Applied Physics Express
作者Hatmanto, Adhi Dwi; Kita, Koji
卷第11卷
期第1期
印刷ISSN1882-0778
电子ISSN1882-0786
文件大小1096.19KB
发表时间2018-01-01
DOI10.7567/APEX.11.011201

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