Corrosion mechanism in PVD deposited nano-scale titanium nitride thin film with intercalated titanium for protecting the surface of silicon
- 期刊名称Electrochimica Acta
- 作者Chaudhry, Ali Usman; Mansoor, Bilal; Mungole, Tarang; Ayoub, Georges; Field, David P.
- 印刷ISSN0013-4686
- 文件大小2456.64KB
- 发表时间2018-1
- DOI10.1016/j.electacta.2018.01.042
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