Study on the mechanism of Si–glass–Si two step anodic bonding process
Hu, Lifang; Wang, Hao; Xue, Yongzhi; Shi, Fangrong; Chen, Shaoping
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Hu, Lifang; Wang, Hao; Xue, Yongzhi; Shi, Fangrong; Chen, Shaoping
- 卷第28卷
- 期第4期
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小1100.04KB
- 发表时间2018-04-01
- DOI10.1088/1361-6439/aaa878