Spectral artefacts post sputter-etching and how to cope with them – a case study of XPS on nitride-based coatings using monoatomic and cluster ion beams
- 期刊名称Applied Surface Science
- 作者Lewin, Erik; Counsell, Jonathan; Patscheider, Jörg
- 印刷ISSN0169-4332
- 文件大小978.40KB
- 发表时间2018-2
- DOI10.1016/j.apsusc.2018.02.191
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