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Knudsen pump produced via silicon deep RIE, thermal oxidation, and anodic bonding processes for on-chip vacuum pumping

Knudsen pump produced via silicon deep RIE, thermal oxidation, and anodic bonding processes for on-chip vacuum pumping

Van Toan, Nguyen; Inomata, Naoki; Trung, Nguyen Huu; Ono, Takahito
  • 期刊名称Journal of Micromechanics and Microengineering
  • 作者Van Toan, Nguyen; Inomata, Naoki; Trung, Nguyen Huu; Ono, Takahito
  • 卷第28卷
  • 期第5期
  • 印刷ISSN0960-1317
  • 电子ISSN1361-6439
  • 文件大小1494.09KB
  • 发表时间2018-05-01
  • DOI10.1088/1361-6439/aaae26
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