Development of a TEM Compatible Nanowire Characterization Platform With Self-Forming Contacts
Moosavi, S. Hoda; Kroener, Michael; Frei, Maxi; Frick, Fabian; Kerzenmacher, Sven; Woias, Peter
- 期刊名称IEEE Transactions on Semiconductor Manufacturing
- 作者Moosavi, S. Hoda; Kroener, Michael; Frei, Maxi; Frick, Fabian; Kerzenmacher, Sven; Woias, Peter
- 卷第31卷
- 期第1期
- 印刷ISSN0894-6507
- 电子ISSN1558-2345
- 文件大小2034.46KB
- 发表时间2018-2
- DOI10.1109/TSM.2018.2793356
- 页码22-31