Relative humidity influence on adhesion effect in MEMS flexible structures
- 期刊名称Microsystem Technologies
- 作者Birleanu, Corina; Pustan, Marius; Rusu, Florina; Dudescu, Cristian; Muller, Raluca; Baracu, Angela
- 印刷ISSN0946-7076
- 电子ISSN1432-1858
- 文件大小1573.32KB
- 发表时间2018-3-19
- DOI10.1007/s00542-018-3848-8
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