Diagnosis of phosphorus monolayer doping in silicon based on nanowire electrical characterisation

• 期刊名称Journal of Applied Physics
• 作者Duffy, Ray; Ricchio, Alessio; Murphy, Ruaidhrí; Maxwell, Graeme; Murphy, Richard; Piaszenski, Guido; Petkov, Nikolay; Hydes, Alan; O'Connell, Dan; Lyons, Colin; Kennedy, Noel; Sheehan, Brendan; Schmidt, Michael; Crupi, Felice; Holmes, Justin D.; Hurley, Paul K.; Connolly, James; Hatem, Chris; Long, Brenda
• 卷第123卷
• 期第12期
• 印刷ISSN0021-8979
• 电子ISSN1089-7550
• 文件大小3999.34KB
• 发表时间2018-03-28
• DOI10.1063/1.5019470