An Analysis of Stepped Trapezoidal Shaped Microcantilever beams for MEMS based Devices
Akarapu, Ashok; Gangele, Aparna; Pal, Prem; Pandey, Ashok Kumar
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Akarapu, Ashok; Gangele, Aparna; Pal, Prem; Pandey, Ashok Kumar
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小727.05KB
- 发表时间2018-03-22
- DOI10.1088/1361-6439/aab8ac