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Effect of Hydrogen Implantation on the Mechanical Properties of AlN throughout Ion-Induced Splitting

Effect of Hydrogen Implantation on the Mechanical Properties of AlN throughout Ion-Induced Splitting

Mamun, M. A.; Tapily, K.; Moutanabbir, O.; Baumgart, H.; Elmustafa, A. A

期刊名称ECS Journal of Solid State Science and Technology
作者Mamun, M. A.; Tapily, K.; Moutanabbir, O.; Baumgart, H.; Elmustafa, A. A
卷第7卷
期第4期
印刷ISSN2162-8769
电子ISSN2162-8777
文件大小640.41KB
发表时间2018
DOI10.1149/2.0131804jss

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