Crystalline Ti-nanostructures prepared by oblique angle deposition at room temperature
- 期刊名称Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
- 作者Liedtke, Susann; Grüner, Christoph; Gerlach, Jürgen W.; Lotnyk, Andriy; Rauschenbach, Bernd
- 卷第36卷
- 期第3期
- 印刷ISSN2166-2746
- 电子ISSN2166-2754
- 文件大小1931.46KB
- 发表时间2018-05
- DOI10.1116/1.5025013
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