Micromechanical resonator with dielectric nonlinearity
- 期刊名称Microsystems & Nanoengineering
- 作者Mateen, Farrukh; Boales, Joseph; Erramilli, Shyamsunder; Mohanty, Pritiraj
- 卷第4卷
- 期第1期
- 电子ISSN2055-7434
- 文件大小981.82KB
- 发表时间2018-12
- DOI10.1038/s41378-018-0013-6
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