Dielectric breakdown of alumina thin films produced by pulsed direct current magnetron sputtering
Hanby, Benjamin V.T.; Stuart, Bryan W.; Grant, David M.; Grant, Colin; Moffat, Jonathan; Blisset, Jonathan; Gerada, Chris; Gimeno-Fabra, Miquel
- 期刊名称Thin Solid Films
- 作者Hanby, Benjamin V.T.; Stuart, Bryan W.; Grant, David M.; Grant, Colin; Moffat, Jonathan; Blisset, Jonathan; Gerada, Chris; Gimeno-Fabra, Miquel
- 印刷ISSN0040-6090
- 文件大小1585.02KB
- 发表时间2018-7
- DOI10.1016/j.tsf.2018.07.004