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An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements

Stegner, Johannes; Gropp, Sebastian; Podoskin, Dmitry; Stehr, Uwe; Hoffmann, Martin; Hein, Matthias A.

期刊名称Sensors
作者Stegner, Johannes; Gropp, Sebastian; Podoskin, Dmitry; Stehr, Uwe; Hoffmann, Martin; Hein, Matthias A.
卷第18卷
期第7期
电子ISSN1424-8220
文件大小1688.09KB
发表时间2018-07-04
DOI10.3390/s18072159