Secondary electron emission characteristics of TiN coatings produced by RF magnetron sputtering

• 期刊名称Journal of Applied Physics
• 卷第124卷
• 期第5期
• 印刷ISSN0021-8979
• 电子ISSN1089-7550
• 文件大小1445.43KB
• 发表时间2018-08-07
• DOI10.1063/1.5035486