Investigation of morphological and optical properties of nanostructured layers formed by the SSCT etching of silicon
- 期刊名称Applied Surface Science
- 作者Jurečka, Stanislav; Imamura, Kentaro; Matsumoto, Taketoshi; Kobayashi, Hikaru
- 印刷ISSN0169-4332
- 文件大小2134.93KB
- 发表时间2018-8
- DOI10.1016/j.apsusc.2018.08.099
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