Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy
Rangelow, Ivo W.; Kaestner, Marcus; Ivanov, Tzvetan; Ahmad, Ahmad; Lenk, Steve; Lenk, Claudia; Guliyev, Elshad; Reum, Alexander; Hofmann, Martin; Reuter, Christoph; Holz, Mathias
- 期刊名称Journal of Vacuum Science & Technology B
- 作者Rangelow, Ivo W.; Kaestner, Marcus; Ivanov, Tzvetan; Ahmad, Ahmad; Lenk, Steve; Lenk, Claudia; Guliyev, Elshad; Reum, Alexander; Hofmann, Martin; Reuter, Christoph; Holz, Mathias
- 卷第36卷
- 期第6期
- 印刷ISSN2166-2746
- 电子ISSN2166-2754
- 文件大小3662.86KB
- 发表时间2018-11
- DOI10.1116/1.5048524