The mechanism study of mixed Ar/O2 plasma-cleaning treatment on niobium surface for work function improvement
- 期刊名称Applied Surface Science
- 作者Zhang, Zhiyan; Ye, Zongbiao; Wang, Zhijun; Gou, Fujun; Shen, Bizhou; Wu, Andong; He, Yuan; He, Pingni; Wang, Hongbin; Chen, Bo; Chen, Jianjun; Zhang, Kun; Wei, Jianjun
- 印刷ISSN0169-4332
- 文件大小1452.29KB
- 发表时间2018-12
- DOI10.1016/j.apsusc.2018.12.156
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