[IEEE 2018 IEEE SENSORS - New Delhi, India (2018.10.28-2018.10.31)] 2018 IEEE SENSORS - Microstructures with Protected Convex Corners in Modified KOH Solution Exhibiting High-Speed Silicon Etching
Rao, Avvaru Venkata Narasimha; Swarnalatha, Veerla; Pandey, Ashok kumar; Pal, Prem
- 作者Rao, Avvaru Venkata Narasimha; Swarnalatha, Veerla; Pandey, Ashok kumar; Pal, Prem
- 文件大小6.30KB
- 发表时间2018
- DOI10.1109/ICSENS.2018.8589751
- 页码1-4