![Low Temperature Atmospheric Pressure Chemical Vapor Deposition of Group 14 Oxide Films]()
Low Temperature Atmospheric Pressure Chemical Vapor Deposition of Group 14 Oxide FilmsHoffman, David M.; Atagi, Lauren M.; Chu, Wei-Kan; Liu, Jia-Rui; Zheng, Zongshuang; Rubiano, Rodrigo R.; Springer, Robert W; Smith, David C. · MRS Proceedings · 1994