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Investigation of Injection- and Radiation-Thermal Processes in Thin Gate Dielectric Films of MIS Structures

Investigation of Injection- and Radiation-Thermal Processes in Thin Gate Dielectric Films of MIS Structures

Andreev, Dmitrii; Bondarenko, Gennady; Andreev, Vladimir; Stolyarov, Alexander
  • 期刊名称Key Engineering Materials
  • 作者Andreev, Dmitrii; Bondarenko, Gennady; Andreev, Vladimir; Stolyarov, Alexander
  • 卷第781卷
  • 电子ISSN1662-9795
  • 文件大小611.85KB
  • 发表时间2018-9
  • DOI10.4028/www.scientific.net/KEM.781.47
  • 页码47-52
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