In-Situ Temperature Measurement on CMOS Integrated Micro-Hotplates for Gas Sensing Devices
- 期刊名称Sensors
- 作者Deluca, Marco; Wimmer-Teubenbacher, Robert; Mitterhuber, Lisa; Mader, Johanna; Rohracher, Karl; Holzer, Marco; Köck, Anton
- 卷第19卷
- 期第3期
- 电子ISSN1424-8220
- 文件大小2153.10KB
- 发表时间2019-02-07
- DOI10.3390/s19030672
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