The influence of Ar pressure on the structure and optical properties of non-hydrogenated a-Si thin films grown by rf magnetron sputtering onto room-temperature glass substrates

Márquez, E.; Saugar, E.; Díaz, J.M.; García-Vázquez, C.; Fernández-Ruano, S.M.; Blanco, E.; Ruiz-Pérez, J.J.; Minkov, D.A.

期刊名称Journal of Non-Crystalline Solids
作者Márquez, E.; Saugar, E.; Díaz, J.M.; García-Vázquez, C.; Fernández-Ruano, S.M.; Blanco, E.; Ruiz-Pérez, J.J.; Minkov, D.A.
卷第517卷
印刷ISSN0022-3093
文件大小1938.21KB
发表时间2019-08
DOI10.1016/j.jnoncrysol.2019.04.034
页码32-43

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