Diffusion of hydrogen atoms in silicon layers deposited from molecular beams on dielectric substrates
Chizh, Kirill V.; Arapkina, Larisa V.; Stavrovsky, Dmitry B.; Gaiduk, Peter I.; Yuryev, Vladimir A.
- 期刊名称Materials Science in Semiconductor Processing
- 作者Chizh, Kirill V.; Arapkina, Larisa V.; Stavrovsky, Dmitry B.; Gaiduk, Peter I.; Yuryev, Vladimir A.
- 卷第99卷
- 印刷ISSN1369-8001
- 文件大小1154.59KB
- 发表时间2019-08
- DOI10.1016/j.mssp.2019.04.014
- 页码78-84