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Design and fabrication of a multipurpose cilia cluster MEMS vector hydrophone

Zhang, Lansheng; Xu, Qingda; Zhang, Guojun; Wang, Renxin; Pei, Yu; Wang, Weidong; Lian, Yuqi; Ji, Songxiang; Zhang, Wendong

期刊名称Sensors and Actuators A: Physical
作者Zhang, Lansheng; Xu, Qingda; Zhang, Guojun; Wang, Renxin; Pei, Yu; Wang, Weidong; Lian, Yuqi; Ji, Songxiang; Zhang, Wendong
卷第296卷
印刷ISSN0924-4247
文件大小3639.92KB
发表时间2019-09
DOI10.1016/j.sna.2019.07.012
页码331-339