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Electronic properties of air-exposed GaN(11-00) and (0001) surfaces after several device processing compatible cleaning steps

Electronic properties of air-exposed GaN(11-00) and (0001) surfaces after several device processing compatible cleaning steps

Auzelle, T.; Ullrich, F.; Hietzschold, S.; Brackmann, S.; Hillebrandt, S.; Kowalsky, W.; Mankel, E.; Lovrincic, R.; Fernández-Garrido, S.
  • 期刊名称Applied Surface Science
  • 作者Auzelle, T.; Ullrich, F.; Hietzschold, S.; Brackmann, S.; Hillebrandt, S.; Kowalsky, W.; Mankel, E.; Lovrincic, R.; Fernández-Garrido, S.
  • 印刷ISSN0169-4332
  • 文件大小3376.99KB
  • 发表时间2019-8
  • DOI10.1016/j.apsusc.2019.07.256
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