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VUV/O3 activated direct heterogeneous bonding towards high-performance LiNbO3-based optical devices

Xu, Jikai; Wang, Chenxi; Zhang, Runbo; Cheng, Ji; Li, Ge; Xiang, Junshan; Tian, Yanhong

期刊名称Applied Surface Science
作者Xu, Jikai; Wang, Chenxi; Zhang, Runbo; Cheng, Ji; Li, Ge; Xiang, Junshan; Tian, Yanhong
卷第495卷
印刷ISSN0169-4332
文件大小2850.86KB
发表时间2019-11
DOI10.1016/j.apsusc.2019.143576