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[IEEE 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Paris, France (2019.5.12-2019.5.15)] 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - FEM Modeling and experimental testing of notched MEMS specimen

[IEEE 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Paris, France (2019.5.12-2019.5.15)] 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - FEM Modeling and experimental testing of notched MEMS specimen

Aurelio, Soma

作者Aurelio, Soma
文件大小2826.09KB
发表时间2019
DOI10.1109/dtip.2019.8752930
页码1-4

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