[IEEE 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Paris, France (2019.5.12-2019.5.15)] 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Design of a Micropump Based on an Industrial Microphone Manufacturing Process
Seidl, Martin; Schrag, Gabriele; Klein, Wolfgang; Vobl, Matthias; Krumbein, Ulrich
- 作者Seidl, Martin; Schrag, Gabriele; Klein, Wolfgang; Vobl, Matthias; Krumbein, Ulrich
- 文件大小2901.91KB
- 发表时间2019
- DOI10.1109/DTIP.2019.8752688
- 页码1-4